Techical specification: Mass Flow Controller: Precision MFC featuring industry
leading repeatability, fast response, ultra-low drift and
self diagnostics
Customer Part Number .
Revision Rev B
Base Model SLA5850 Rev B Flow
Controller
Max Press 1500 psig [103 BAR]
Max Temp 149F [65C]
Body Material 316L SS
Valve Type Normally closed
Valve Seat Material Viton
Seals / O-Ring Viton o-rings
Electrical Connector 2x Sub D
Connection Size 1/4-IN
Connection Type BSP
FS Flow Rate 5 NLPM
Fluid / Gas AIR
Flow Type SV
Inlet Pressure 6.00 barg
Outlet Pressure 5.00 barg
Cal Ref Temp 0'C
Communications Profibus DPV1
Input Signal 0-5 V
Output Signal 0-5 V
Electrical Conn. - Digital Profibus (1x 15-pin Sub-D /
1x 9-pin Sub-D)
Baud Rate Not applicable
Output Enhancement Standard settling /
response time
Power Supply 24 Vdc
Certification None (safe area use)
Mounting Attitude (1) Horizontal base down
Calibration Single standard calibration
up to 200 PSIG
OEM Standard Brooks label
Orifice 0.020 orifice
Restrictor Size code Y
Restrictor Type ACLFE / Wiremesh
Customer Tag Requirements No Tags
Operating Temp 20 C
Sensor Factor 0.998
- Zolltarifnummer 9032 89 60
- Ursprungsland Ungarn