Techical specification: Mass Flow Controller: Precision MFC featuring industry
leading repeatability, fast response, ultra-low drift and
self diagnostics
Customer Part Number T260093/001
Revision Rev B
Base Model SLA5850 Rev B Flow
Controller
Max Press 1500 psig [103 BAR]
Max Temp 149F [65C]
Body Material 316L SS
Valve Type Normally closed
Valve Seat Material Viton
Seals / O-Ring Viton o-ring
Electrical Connector 15-pin D-Conn
Connection Size 1/4-IN
Connection Type RCBSP w\Filter
FS Flow Rate 20 NLPM
Fluid / Gas AIR
Flow Type SV
Inlet Pressure 8 bar g
Outlet Pressure 6.4 barg
Cal Ref Temp 0'C
Communications Smart Emulation
Input Signal 0-5
Output Signal 0-5 V
Electrical Conn. - Digital Smart Emulation (Analog
and/or RS485) REV-B
Baud Rate 19200 baud Standard Rate
Output Enhancement Standard settling /
response time
Power Supply 24 Vdc
Certification None (safe area use)
Mounting Attitude (1) Horizontal base down
SLA5850ST1AB1B2A1 (Continued)
Calibration Single standard calibration
up to 200 PSIG
OEM Standard Brooks label
Orifice 0.032 orifice
Restrictor Size code 4
Restrictor Type ACLFE / Wiremesh
Customer Tag Requirements No Tags
Operating Temp 20 C
Sensor Factor 0.998